Products
Porous Ceramic Vacuum Chuck Table
A variety of porous chuck (Examples of customizing)
 1. Rectangular type (300x300x35t) |
 2. Frame type (690x570x50t) |
 3. Circular type (100mm in diameter) |
 4. Separate area type |
 5. Taps and holes example |
 6.Disk type for lapping machine (640mm) |
 7.Multi station type |
 8.All porous ceramic (300mm in diameter) |
Cross-section of porous chuck
Specifications
| Top surface color | Gray, (White for special requirement) |
| Size | Up to 2500x220x 350t, or 2000mm in diameter |
| Designed porosity | 40vol% |
| Designed average pore size | 40micrometer |
| Base plate material | Porous ceramic, Granite, Man-made granite, etc. |
| Outer rim seal | Epoxy resin seal |
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