Products

• Since Nano TEM diamond grinding wheel has porous structure, coolant water and air go through the diamond wheel toward work-piece.
  By controlling pressure of the coolant water and the air, the gap between work-piece and diamond wheel can be managed in large or small.
• By doing that, surface morphology of the work-piece, such as surface roughness, can be maintained or adjusted toward user’s demand.
• Left spindle has a cup type diamond wheel. Right spindle has a straight type diamond wheel. With help of CNC control, a flat or a curved surface can be generated according to user’s needs. Porous vacuum chuck surface is self-ground before actual work-piece grinding. The work-piece is set to the chuck and ground under high precision transcription (For more info. see “Features” of Porous Ceramic Vacuum Chuck Table).

NRG2000 is an achievement of the next generation grinding technology that comes up with manufacturing technology of a Nano TEM unique diamond grinding wheel and a large sized porous ceramic vacuum chuck. This machine gives a grinding process solution for flat panel display industry that has a tendency of continuous glass size growth.

Nano TEM unique diamond grinding wheel has two parts of patterned diamond part and non-diamond part called “core part”. The diamond patterned part is shaped in hexagonal or triangle. The core part is generally made of green carborandum. The diamond part is stronger than the core part in bonding strength between particles. Therefore, the core part wears more than the diamond part during grinding. This phenomenon maintains the diamond part protrusion approximately a few micrometers (depending upon diamond grain size), and the diamond part mainly contacts to work-piece throughout the grinding process. Diamond part patterning makes high diamond penetrating force toward work-piece, resulting in high removal rate.

Diamond grinding wheel

Nano TEM diamond grinding wheel is porous and has porosity of more than 40%. Water and air can pass through the diamond wheel toward work-piece. Controlling the water and air pressure changes the distance between diamond and work-piece, and manages surface morphology of the work-piece as a result. Water from inside diamond wheel so-called “Internal Water” performs better coolant ability than water supplied through nozzles, so-called “External Water”. External water is scattered by the grinding wheel rotation and does NOT reach to the actual grinding point where diamond grains actually contact to work-piece surface. If surface damage of work-piece can be minimized by using internal water and air, then process time of lapping and polishing can be shortened and product geometrical precision can be improved.

Porous Ceramic Vacuum Chuck Table (PC-VCT) for Rotary Table

Porous chuck allows water and air come out from chuck surface. As loading a glass substrate, for instance, water and air come through porous chuck and receive the glass gently 

Specifications [NRG2000]

■Applications

●Synthetic quartz glass for photomasks

●Mother glass for liquid crystal display unitl G6 class

●Soda-lime glass（blue plate）