Technical Literature
Core Technology
Nano TEM own "ceramic sintering technology" ideal tool for developing the site in hope to achieve the evolution of advanced technologies.
The traditional tools can not be processed sapphire, quartz glass, in the face of new materials such as silicon,
"I wish there was such a tool" and hope that thousands of sites,
Evolving cutting, polishing and processing technology is the driving force and grinding.
The new material in order not to waste time and materials, new tools are required.
Any difficult material (sapphire, quartz glass, silicon, and ceramics), cutting the natural, polished, to disconnect.
As a result, to improve the efficiency and utilization of materials in the field.
Nano TEM, the expert group on precision machining and material,
Enabling technology and tools development based on innovative ideas.
Ceramic sintering technology
Controlled by the addition of sintering aids.
Sintering can be complete by the eutectic reaction of primary and auxiliary materials. Zero dust。
Pore(hole) diameter (1 to 200 microns), porosity (10-60%)controlable。


(写真左:完全焼結事例、写真右:気孔制御事例)
![]()
Chuck conventional vacuum, the grooved surface of stainless steel and aluminum adsorption, adsorption to work there in a hole. However, this does work groove, the hole gets a dent, adsorption is not precise. The development of the porous ceramics can regulate stomatal from submicron to several hundred microns. Microscopic pores吸出SHI the air, and work polishing paste in a ceramic surface, and a vacuum chuck.

