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Porous Ceramics Vacuum Chuck With 40 micrometer pores in average, a substrate is fastened onto the chuck surface without dimples. Good at customizing and manufacturing in large scale.
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Precise Cutting Technology (Dicing Blade) Suitable for dicing hard and brittle materials such as ceramic and crystal substrates such as Al2O3, AlN, sapphire and so on. Variety from 0.1 to 1 mm in thickness. Outer and inner diameters can be freely customized by customer’s specific requirement.
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Precision Diamond Grinding Wheel Since diamond part is harder than core part (e.g. GC part), the latter wears faster than the former and the former slightly keeps protruding to work piece to grind. With 40vol% of porosity, the diamond wheel lets water through itself and gives sufficient coolant effect directly to work piece and diamond grains.
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Grinding Machines (The Grinder, NRG2000) As a result of continuous effort on developing next generation grinding technology, NanoTEM grinding machines provide new solutions for semi-conductor and flat panel display industries that keep growing and expanding.
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